Precision Measurement Method of Laser Beams Based on Coordinate Measuring Machine
A high-precision stability measurement scheme was designed and prototyped with the purpose of ensuring precise laser beam alignment during the assembly of an integrated interferometer. With retroreflectors added, the angular resolution of the system is improved while ensuring system stability. Hydro...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8794789/ |