A Capacitive Micromachined Ultrasonic Transducer-Based Resonant Sensor Array for Portable Volatile Organic Compound Detection with Wireless Systems

A Capacitive Micromachined Ultrasonic Transducer-Based Resonant Sensor Array for Portable Volatile Organic Compound Detection with Wireless Systems

The development of portable volatile organic compound (VOC) sensors is essential for home healthcare and workplace safety because VOCs are environmental pollutants that may critically affect human health. Here, we report a compact and portable sensor platform based on a capacitive micromachined ultr...

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Bibliographic Details
Main Authors: Inug Yoon, Gayoung Eom, Sungwoo Lee, Bo Kyeong Kim, Sang Kyung Kim, Hyunjoo J. Lee
Format: Article
Language:English
Published: MDPI AG 2019-03-01
Series:Sensors
Subjects:
resonant gas sensor
multiplex detection
VOC
CMUT
selectivity
Online Access:https://www.mdpi.com/1424-8220/19/6/1401

Internet

https://www.mdpi.com/1424-8220/19/6/1401

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