Fabrication and Characterization of High-Optical-Quality-Factor Hybrid Polymer Microring Resonators Operating at Very Near Infrared Wavelengths

Fabrication and Characterization of High-Optical-Quality-Factor Hybrid Polymer Microring Resonators Operating at Very Near Infrared Wavelengths

In this paper, we present a new fabrication method for large-area hybrid polymer microring resonators using a rib waveguide configuration with a minimum residual layer down to 40 nm by ultraviolet (UV) nanoimprint lithography. In a first step, a negative photoresist (SU8-2) patterned by photolithogr...

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Bibliographic Details
Main Authors: R. Morarescu, P. K. Pal, N. T. Beneitez, J. Missinne, G. V. Steenberge, P. Bienstman, G. Morthier
Format: Article
Language:English
Published: IEEE 2016-01-01
Series:IEEE Photonics Journal
Subjects:
Hybrid polymer photonic device
UV-nanoimprint
optical waveguides
racetrack microring resonator
Online Access:https://ieeexplore.ieee.org/document/7437395/

Internet

https://ieeexplore.ieee.org/document/7437395/

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