Analysis of Electron Transport Coefficients in SiH4 Gas Using Boltzmann Equation in the Presence of Applied Electric Field
Monosilane (SiH4) plasma has numerous applications in plasma processing, transport coefficients are better to understanding and modeling of these gas discharge processes. The electron swarms in a monosilane gas under influence of uniform electric field can be calculated using two term approximatio...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Salahaddin University-Erbil
2019-02-01
|
| Series: | Zanco Journal of Pure and Applied Sciences |
| Subjects: | |
| Online Access: | http://zancojournals.su.edu.krd/index.php/JPAS/article/view/2330 |