Deuterated SiN/SiON Waveguides on Si Platform and Their Application to C-Band WDM Filters
We describe low-loss SiN/SiON waveguides for wavelength-division-multiplexing filters on a Si platform. The key technology is a low-temperature deposition of refractiveindex-controllable SiN/SiON films by using a hydrogen-free gas source (SiD4), which avoids the strong optical absorption due to N-H...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2017-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7995037/ |