Fabrication and Characterization of Ethanol Sensor Based on RF Sputtered ITO Films
In the present work, we report the fabrication and testing of a sensor for the detection of ethanol vapours using RF magnetron sputter deposited ITO thin film on Si substrate. The principle of operation is the change of resistance of ITO film on exposure to ethanol vapours. The ITO films were prepar...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2011-02-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/february_2011/P_SI_139.pdf |