Impact of Improved Design on Knudsen Force for Micro Gas Sensor
Knudsen force generated by thermally driven gas flow in a microscale structure has been used for gas detection and has shown immeasurable potential in the field of microelectromechanical system (MEMS) gas sensors due to its novel sensing characteristics. In this article, the performances of three ki...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-06-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/11/7/634 |