Study of Residual Stress Compensation in Continuous Membrane Micromirrors Based on Surface Micromachining Processes
Residual stress is one of the key factors that directly determines the optical quality of micro-optical devices. With the same residual stress, the larger the aperture is, the worse the optical quality is. Therefore, continuous micromirrors are more affected by residual stress than segmented micromi...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-03-01
|
| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/11/3/289 |