A Special Vibration Gyroscope
A novel silicon micro-machined gyroscope which is driven by the rotating carrier’s angular velocity is introduced. The principle of structure is analyzed. The mathematic module is also established. Process of making the vibration silicon modules is given and the manufacturing of “Sandwiches” sensor...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2008-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/march_08/Special_Issue_Vol_90/P_SI_43.pdf |