Smartphone Display Based Photolithography to Fabricate Microdevices

We demonstrate a smartphone-based low cost photolithography technique that can be easily adapted, especially in university laboratories. In the initial experiments, we used only the display from a smartphone as the source of light and successfully transferred micrometer sized patterns in an optical...

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Bibliographic Details
Main Authors: Neam Heng Lee, Jian Zhen Tay, Varghese Swamy, N. Ramakrishnan
Format: Article
Language:English
Published: IEEE 2018-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/8391703/