Smartphone Display Based Photolithography to Fabricate Microdevices
We demonstrate a smartphone-based low cost photolithography technique that can be easily adapted, especially in university laboratories. In the initial experiments, we used only the display from a smartphone as the source of light and successfully transferred micrometer sized patterns in an optical...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2018-01-01
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Series: | IEEE Access |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/8391703/ |