Influence of the secondary electron emission on the characteristics of radio frequency plasmas
In this paper the influence of secondary emission on the characteristics of RF plasmas has been studied. An asymmetrical dual-frequency capacitively coupled plasma reactor has been modeled with one dimensional PIC/MCC (Particle in Cell with Implemented Monte Carlo Collisions) code. The main feat...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Association of Chemical Engineers of Serbia
2011-01-01
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| Series: | Hemijska Industrija |
| Subjects: | |
| Online Access: | http://www.doiserbia.nb.rs/img/doi/0367-598X/2011/0367-598X1000063B.pdf |