A surface acoustic wave micropump to pump fluids from a droplet into a closed microchannel using evaporation and capillary effects
A new method for converting a microdroplet on a piezoelectric substrate into continuous fluid flow in microchannels is presented. An interdigital transducer with 27.5 MHz center frequency is fabricated on a 1280 yx-LiNbO3 piezoelectric substrate for exciting surface acoustic wave. A PDM...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2014-12-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4905062 |