The effect of oxygen flow rate on refractive index of aluminum oxide film deposited by electron beam evaporation technique
The effects of oxygen flow rate on refractive index of aluminum oxide film have been investigated. The Al2O3 films are deposited by electron beam on glass substrate at different oxygen flow rates. The substrate was heated to reach and the temperature was constant during the thin film growt...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Isfahan University of Technology
2016-02-01
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| Series: | Iranian Journal of Physics Research |
| Subjects: | |
| Online Access: | http://ijpr.iut.ac.ir/browse.php?a_code=A-10-1-746&slc_lang=en&sid=1 |