Determination of multilayer thicknesses of GaAs/AlAs superlattice by grazing incidence X-ray reflectivity
The grazing incidence X-ray reflectivity is used to determine the multilayer thickness of GaAs/AlAs supperlattice. The measurement process includes the fitting model and the measurement conditions (different powers of 45 kV × 40 mA, 40 kV × 40 mA and 35 kV × 40 mA, diff...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2013-01-01
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| Series: | International Journal of Metrology and Quality Engineering |
| Subjects: | |
| Online Access: | https://www.metrology-journal.org/articles/ijmqe/pdf/2013/02/ijmqe130040.pdf |