Determination of multilayer thicknesses of GaAs/AlAs superlattice by grazing incidence X-ray reflectivity

• Main Authors: Ren L.L., Gao H.F., Gao S.T., Liu J.J., Zhang W.
• Format: Article
• Language: English
• Published: EDP Sciences 2013-01-01
• Series: International Journal of Metrology and Quality Engineering
• Subjects: multilayer thickness; grazing incidence x-ray reflectivity; gaas/alas supperlattice; combined standard deviation; valid measurement process
• Online Access: https://www.metrology-journal.org/articles/ijmqe/pdf/2013/02/ijmqe130040.pdf
• ISSN: 2107-6839; 2107-6847

The grazing incidence X-ray reflectivity is used to determine the multilayer thickness of GaAs/AlAs supperlattice. The measurement process includes the fitting model and the measurement conditions (different powers of 45 kV × 40 mA, 40 kV × 40 mA and 35 kV × 40 mA, different step sizes of 0.005°, 0.008° and 0.010°, and different times per step of 1 s, 2 s, 3 s). In order to obtain the valid measurement process, the combined standard deviation is used as the normal of the fitting results selection. As a result, the measurement condition of 0.008° step size and 2 s time per step with the power 40 kV × 40 mA is selectable with the operation stability of facilities and smaller error.