Determination of multilayer thicknesses of GaAs/AlAs superlattice by grazing incidence X-ray reflectivity
The grazing incidence X-ray reflectivity is used to determine the multilayer thickness of GaAs/AlAs supperlattice. The measurement process includes the fitting model and the measurement conditions (different powers of 45 kV × 40 mA, 40 kV × 40 mA and 35 kV × 40 mA, diff...
Main Authors: | , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
EDP Sciences
2013-01-01
|
Series: | International Journal of Metrology and Quality Engineering |
Subjects: | |
Online Access: | https://www.metrology-journal.org/articles/ijmqe/pdf/2013/02/ijmqe130040.pdf |
Summary: | The grazing incidence X-ray reflectivity is used to determine the multilayer thickness of
GaAs/AlAs supperlattice. The measurement process includes the fitting model and the
measurement conditions (different powers of 45 kV × 40 mA, 40 kV × 40 mA and 35 kV × 40
mA, different step sizes of 0.005°, 0.008° and 0.010°,
and different times per step of 1 s, 2 s, 3 s). In order to obtain the valid measurement
process, the combined standard deviation is used as the normal of the fitting results
selection. As a result, the measurement condition of 0.008° step size and 2 s
time per step with the power 40 kV × 40 mA is selectable with the operation stability of
facilities and smaller error. |
---|---|
ISSN: | 2107-6839 2107-6847 |