Electrical Characterization of a Nanoporous Silicon Sensor for Low ppm Gas Moisture Sensing
A nanoporous silicon sensor prepared by electrochemical etching of p type single crystal silicon in HF electrolyte has been characterized for measuring gas moisture in the range of 6 to 100 ppmV. Impedance characteristics show that PS may also be useful for developing CMOS compatible trace moisture...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2007-11-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/november_07/P_203.pdf |