Free space microwave characterization of silicon wafers for microelectronic applications / Zaiki Awang, Deepak Kumar Ghodgaonkar and Noor Hasimah Baba
A contactless and non-destructive microwave method has been developed to characterize silicon semiconductor wafers from reflection and transmission measurements made at normal incidence using MNDT. The measurement system consists of a pair of spot-focusing horn lens antenna, mode transitions, coaxia...
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| Format: | Article |
| Language: | English |
| Published: |
Institute of Research, Development and Commercialisation (IRDC),
2005.
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| Online Access: | Get fulltext View Fulltext in UiTM IR |