Fabrication and characterization of 0.24 micron CMOS device by using simulation / Nazirah Mohamat Kasim, Rosfariza Radzali and Ahmad Puad Ismail
Simulation and analyzing the electrical characteristics of 0.24 micron CMOS device was done by using Silvaco TCAD. Electrical characteristics were carried out by using Atlas device simulator, while for simulation the process was carried out by using Athena process simulator to modify theoretical val...
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Teknologi MARA, Pulau Pinang & Pusat Penerbitan Universiti (UPENA),
2010.
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| Subjects: | |
| Online Access: | Get fulltext View Fulltext in UiTM IR |