Fabrication of MSM UV photodetector based on ZnO films synthesized by RF magnetron sputtering / Halim Ahmad, Mat Johar Abdullah and Ajis Lepit
C-axis oriented ZnO films were deposited on SiO2/Si substrates through RF magnetron sputtering, MSM UV photodetector using Ag/ZnO/Ag configuration were fabricated from the as prepared film while the heat treated film was used to fabricate MSM Schottky barrier UV photodetector using Al/ZnO/Ag configu...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Teknologi MARA, Sabah,
2017-01.
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| Subjects: | |
| Online Access: | Get fulltext View Fulltext in UiTM IR |