Structural study of porous Si with different crystal orientation fabricated using two-step alternating current photo-electrochemical etching technique / Fatimah Zulkifli ... [et al.]
Two different crystal orientation of n-type Si substrates n(100) and n(111) were used to fabricate porous structure using two-step Alternating Current Photo- Electrochemical (ACPEC) etching technique. This research aims to investigate the difference of porous structure and properties for different o...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Teknologi MARA,
2021-10.
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| Subjects: | |
| Online Access: | Get fulltext View Fulltext in UiTM IR |