Characterization of graphene based capacitive microphone
This research focuses on the design, fabrication and characterization of the graphene based capacitive microphone. Finite element analysis (FEA) is first simulated in order to design and study the proposed graphene based capacitive microphone. While the fabrication introduced MEMS technique in order...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Penerbit Universiti Kebangsaan Malaysia,
2019-06.
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| Online Access: | Get fulltext |