Investigating the impact of growth temperature on WS2 thin film
Radio-frequency (RF) Magnetron Sputtering was used to deposit thin tungsten di sulfide (WS2 ) films on top of soda lime glass substrates. Deposition temperature of RF magnetron sputtering was varied from room temperature (RT) to 200o C with 50o C interval to investigate the impact on film characteri...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Penerbit Universiti Kebangsaan Malaysia,
2020.
|
| Online Access: | Get fulltext |