Kesan halaju putaran gilapan terhadap peratus potongan hujung sisi pandu gelombang polimer SU-8 di atas substrat silikon
This research have focused on polishing characterize of polymer based waveguides. The aims of this research are to study how polishing rotation speeds affect the length of cut end face SU-8 polymer on silicon substrate. There are seven sets of rotation velocities which are 50, 100, 150, 200, 250, 30...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2009.
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| Online Access: | Get fulltext |