Preparation of porous Si (100) for overgrown cubic layer: morphological investigation

A number of n-type Si (100) samples were prepared into porous structures via electrochemical etching process, using an electrolyte solution; HF and ethanol. The morphological properties of the samples were observed under scanning electron microscope measurement. The results showed that the pore dens...

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Bibliographic Details
Main Authors: M.E.A., Samsudin (Author), M., Ikram Md Taib (Author), N., Zainal (Author), R., Radzali (Author), S., Yaakob (Author), Z., Hassan (Author)
Format: Article
Language:English
Published: Universiti Kebangsaan Malaysia, 2013-09.
Online Access:Get fulltext