Preparation of porous Si (100) for overgrown cubic layer: morphological investigation
A number of n-type Si (100) samples were prepared into porous structures via electrochemical etching process, using an electrolyte solution; HF and ethanol. The morphological properties of the samples were observed under scanning electron microscope measurement. The results showed that the pore dens...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
Universiti Kebangsaan Malaysia,
2013-09.
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Online Access: | Get fulltext |