Characterizations of cupric oxide thin films on glass and silicon substrates by radio frequency magnetron sputtering
Cupric oxide (CuO) thin films were prepared on a glass and silicon (Si) substrates by radio frequency magnetron sputtering system. The structural, optical and electrical properties of CuO films were characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), Fourier transform infrared s...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Kebangsaan Malaysia,
2014-04.
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| Online Access: | Get fulltext |