Silicon self-assembled nanodots fabricated using a radio-frequency magnetron sputtering method
Silicon nanodot is a promising nanostructured material for future single-electron devices in nanoelectronic system. The self-assembly growth of silicon nanodots on sapphire substrate was investigated, with highlights on the very early stage of nucleation and the growth process. The scope of study co...
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Format: | Thesis |
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2008-01.
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Online Access: | Get fulltext |