UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)
A study of optical properties of Diamond-like Carbon Thin Films deposited by DC-PECVD. The films was deposited on the corning with the ratio of Hydrogen, H2 (97%) and Methane, CH4 (3%). The temperatures were varied between 200°C to 600°C while maintaining other important variables such as DC voltage...
Main Author: | |
---|---|
Format: | Thesis |
Published: |
2010-11.
|
Subjects: | |
Online Access: | Get fulltext |