Optical properties of diamond like carbon films prepared by DC-PECVD
Diamond-like carbon (DLC) thin films were deposited at different substrate temperatures using methane and hydrogen gas in DC-PECVD at 2x10-1Torr. From the light transmission using UV-VIS spectroscopy it was found that the optical transition had changed from allowed indirect transition to allowed dir...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Ibnu Sina Institute for Fundamental Science Studies, Universiti Teknologi Malaysia,
2012.
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| Subjects: | |
| Online Access: | Get fulltext |