Aluminum-copper bilayers thin films deposited at room temperature by RF magnetron sputtering
In this work, the effects of room temperature deposition on the structural properties of Al-Cu bilayers thin films were investigated. The bilayers were sputter deposited by RF magnetron sputtering on Si {100} wafers without substrate heating. The thickness of each layer is approximately 500 nm thick...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publication,
2014.
|
| Subjects: | |
| Online Access: | Get fulltext |