The effect of thickness on ZnO thin film CO gas sensor
Rf magnetron sputtering system were using to deposited ZnO thin films onto corning substrates as a CO gas sensor. The sensing properties of the thin film thickness on CO gas was investigated. The film thickness was varied by controlling the deposition time.The CO gas sensing properties were determin...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Ibnu Sina Institute for Fundamental Science Studies, UTM,
2006.
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| Subjects: | |
| Online Access: | Get fulltext Get fulltext |