Integration of shape memory alloy for microactuation
Shape memory alloy (SMA) actuators in microelectromechanical system (MEMS) have a broad range of applications. The alloy material has unique properties underlying its high working density, simple structures, large displacement and excellent biocompatibility. These features have led to its commercial...
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| Format: | Thesis |
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2016-09.
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| Online Access: | Get fulltext |