Application of micro-electro-mechanical systems (MEMS) as sensors: A review
This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection o...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Fuji Technology Press,
2020.
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| Subjects: | |
| Online Access: | Get fulltext |