Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks

Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks

A scalable approach for integrated photonic networks in single-crystal diamond using triangular etching of bulk samples is presented. We describe designs of high quality factor (Q =  2.51 × 10[superscript 6]) photonic crystal cavities with low mode volume (V[subscript m] = 1.062 × (λ/n)[superscript...

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Bibliographic Details
Main Authors: Li, L. (Contributor), Zheng, J. (Contributor), Lu, M. (Author), Stein, A. (Author), Ruggiero, C. A. (Author), Salzman, J. (Author), Kalish, R. (Author), Bayn, Igal (Contributor), Mouradian, Sara L. (Contributor), Goldstein, Jordan A. (Contributor), Schroder, Tim (Contributor), Chen, Edward H. (Contributor), Gaathon, Ophir (Contributor), Englund, Dirk Robert (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Media Laboratory (Contributor), Massachusetts Institute of Technology. Research Laboratory of Electronics (Contributor)
Format: Article
Language:English
Published: American Institute of Physics (AIP), 2015-11-24T18:14:56Z.
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