Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks

• Main Authors: Li, L. (Contributor), Zheng, J. (Contributor), Lu, M. (Author), Stein, A. (Author), Ruggiero, C. A. (Author), Salzman, J. (Author), Kalish, R. (Author), Bayn, Igal (Contributor), Mouradian, Sara L. (Contributor), Goldstein, Jordan A. (Contributor), Schroder, Tim (Contributor), Chen, Edward H. (Contributor), Gaathon, Ophir (Contributor), Englund, Dirk Robert (Contributor)
• Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Media Laboratory (Contributor), Massachusetts Institute of Technology. Research Laboratory of Electronics (Contributor)
• Format: Article
• Language: English
• Published: American Institute of Physics (AIP), 2015-11-24T18:14:56Z.
• Subjects: Article
• Online Access: Get fulltext

A scalable approach for integrated photonic networks in single-crystal diamond using triangular etching of bulk samples is presented. We describe designs of high quality factor (Q =  2.51 × 10[superscript 6]) photonic crystal cavities with low mode volume (V[subscript m] = 1.062 × (λ/n)[superscript 3]), which are connected via waveguides supported by suspension structures with predicted transmission loss of only 0.05 dB. We demonstrate the fabrication of these structures using transferred single-crystal silicon hard masks and angular dry etching, yielding photonic crystal cavities in the visible spectrum with measured quality factors in excess of Q = 3 × 10[superscript 3].
United States. Air Force Office of Scientific Research (Presidential Early Career Award for Scientists and Engineers Grant FA9550-11-1-0014)
Alexander von Humboldt-Stiftung
United States. National Aeronautics and Space Administration (Office of the Chief Technologist Space Technology Research Fellowship)
United States. Air Force Office of Scientific Research. Multidisciplinary University Research Initiative (Quantum Memories)
National Science Foundation (U.S.). Integrative Graduate Education and Research Traineeship