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|a Li, L.
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|a Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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|a Massachusetts Institute of Technology. Media Laboratory
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|a Massachusetts Institute of Technology. Research Laboratory of Electronics
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|a Bayn, Igal
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|a Mouradian, Sara L.
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|a Li, L.
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|a Goldstein, Jordan A.
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|a Schroder, Tim
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|a Zheng, J.
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|a Chen, Edward H.
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|a Gaathon, Ophir
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|a Englund, Dirk Robert
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|a Zheng, J.
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|a Lu, M.
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|a Stein, A.
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|a Ruggiero, C. A.
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|a Salzman, J.
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|a Kalish, R.
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|a Bayn, Igal
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|a Mouradian, Sara L.
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|a Goldstein, Jordan A.
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|a Schroder, Tim
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|a Chen, Edward H.
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|a Gaathon, Ophir
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|a Englund, Dirk Robert
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|a Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks
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|b American Institute of Physics (AIP),
|c 2015-11-24T18:14:56Z.
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|z Get fulltext
|u http://hdl.handle.net/1721.1/100033
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|a A scalable approach for integrated photonic networks in single-crystal diamond using triangular etching of bulk samples is presented. We describe designs of high quality factor (Q = 2.51 × 10[superscript 6]) photonic crystal cavities with low mode volume (V[subscript m] = 1.062 × (λ/n)[superscript 3]), which are connected via waveguides supported by suspension structures with predicted transmission loss of only 0.05 dB. We demonstrate the fabrication of these structures using transferred single-crystal silicon hard masks and angular dry etching, yielding photonic crystal cavities in the visible spectrum with measured quality factors in excess of Q = 3 × 10[superscript 3].
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|a United States. Air Force Office of Scientific Research (Presidential Early Career Award for Scientists and Engineers Grant FA9550-11-1-0014)
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|a Alexander von Humboldt-Stiftung
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|a United States. National Aeronautics and Space Administration (Office of the Chief Technologist Space Technology Research Fellowship)
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|a United States. Air Force Office of Scientific Research. Multidisciplinary University Research Initiative (Quantum Memories)
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|a National Science Foundation (U.S.). Integrative Graduate Education and Research Traineeship
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|a en_US
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|a Article
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|t Applied Physics Letters
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