Photonic-electronic integration with polysilicon photonics in bulk CMOS
Here, I review the development of a polysilicon photonic platform that is optimized for integration with electronics fabricated on bulk silicon wafers. This platform enables large-scale monolithic integration of silicon photonics with microelectronics. A single-polysilicon deposition and lithography...
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| Format: | Article |
| Language: | English |
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SPIE,
2016-01-27T17:14:53Z.
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| Online Access: | Get fulltext |