Chemically assisted femtosecond laser machining for applications in LiNbO[subscript 3] and LiTaO[subscript 3]
We introduce and optimize a fabrication procedure that employs both femtosecond laser machining and hydrofluoric acid etching for cutting holes or voids in slabs of lithium niobate and lithium tantalate. The fabricated structures have 3 μm lateral resolution, a lateral extent of at least several mil...
| Main Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
Springer Berlin Heidelberg,
2016-07-14T14:43:41Z.
|
| Subjects: | |
| Online Access: | Get fulltext |