Erratum to: Comparative Studies of the Growth and Characterization of Germanium Epitaxial Film on Silicon (001) with 0° and 6° Offcut
In the original article we presented results that show that the strain in germanium (Ge) epitaxial films grown directly on a silicon (Si) (001) with 6° offcut has a tensile strain of 0.6%. This strain value is much higher than the typical tensile strain value of 0.2% reported for Ge/Si. This discrep...
Main Authors: | , , , , |
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Other Authors: | , |
Format: | Article |
Language: | English |
Published: |
Springer US,
2016-12-16T19:10:05Z.
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Subjects: | |
Online Access: | Get fulltext |