Electrowetting-on-Dielectric Actuation of a Vertical Translation and Angular Manipulation Stage
Adhesion and friction during physical contact of solid components in microelectromechanical systems (MEMS) often lead to device failure. Translational stages that are fabricated with traditional silicon MEMS typically face these tribological concerns. This work addresses these concerns by developing...
Main Authors: | , , , , , , |
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Other Authors: | , , |
Format: | Article |
Language: | English |
Published: |
American Institute of Physics (AIP),
2017-03-27T14:40:14Z.
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Subjects: | |
Online Access: | Get fulltext |