Electrowetting-on-Dielectric Actuation of a Vertical Translation and Angular Manipulation Stage

Electrowetting-on-Dielectric Actuation of a Vertical Translation and Angular Manipulation Stage

Adhesion and friction during physical contact of solid components in microelectromechanical systems (MEMS) often lead to device failure. Translational stages that are fabricated with traditional silicon MEMS typically face these tribological concerns. This work addresses these concerns by developing...

Full description

Bibliographic Details
Main Authors: Wang, Evelyn (Contributor), Preston, Daniel John (Contributor), Anders, Ariel S (Contributor), Barabadi, Banafsheh (Contributor), Tio, Evelyn (Contributor), Zhu, Yangying (Contributor), Dai, DingRan (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Department of Mechanical Engineering (Contributor), Wang, Evelyn N (Contributor)
Format: Article
Language:English
Published: American Institute of Physics (AIP), 2017-03-27T14:40:14Z.
Subjects:
Article
Online Access:Get fulltext

Internet

Get fulltext

Similar Items