Low-loss photonic device in Ge-Sb-S chalcogenide glass

Low-loss photonic device in Ge-Sb-S chalcogenide glass

Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge₂₃Sb₇S₇₀ chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low pr...

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Bibliographic Details
Main Authors: Novak, Spencer (Author), Richardson, Kathleen (Author), Du, Qingyang (Contributor), Huang, Yizhong (Contributor), Li, Junying (Contributor), Kita, Derek M. (Contributor), Michon, Jerome (Contributor), Lin, Hongtao (Contributor), Li, Lan (Contributor), Zhang, Wei (Contributor), Hu, Juejun (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor)
Format: Article
Language:English
Published: Optical Society of America, 2017-12-08T14:40:03Z.
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