Scalable, Modular Three-Dimensional Silicon Microelectrode Assembly via Electroless Plating
We devised a scalable, modular strategy for microfabricated 3-D neural probe synthesis. We constructed a 3-D probe out of individual 2-D components (arrays of shanks bearing close-packed electrodes) using mechanical self-locking and self-aligning techniques, followed by electroless nickel plating to...
Main Authors: | , , , , , , , |
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Other Authors: | , |
Format: | Article |
Language: | English |
Published: |
Multidisciplinary Digital Publishing Institute,
2018-09-28T14:58:04Z.
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Subjects: | |
Online Access: | Get fulltext |