Micro Snap-Fits for Latching 3D MEMS Assemblies
This paper reports the design, fabrication and demonstration of micro-scale mechanical latches (micro snapfits) for assembling 3D micro-structures from 2D patterned precursors. The latches consist of pairs of pointy arrowheadlike features mounted on cantilevers, on one membrane, and corresponding sl...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
ASME International,
2018-10-30T13:59:29Z.
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| Subjects: | |
| Online Access: | Get fulltext |