A Silicon MEMS EM vibration energy harvester

A Silicon MEMS EM vibration energy harvester

This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The h...

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Bibliographic Details
Main Authors: Yang, Ying-Ching Eric (Author), Radhakrishna, Ujwal (Author), Ward, D. (Author), Chandrakasan, Anantha P (Author), Lang, Jeffrey H. (Author)
Other Authors: Massachusetts Institute of Technology. Research Laboratory of Electronics (Contributor), Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor)
Format: Article
Language:English
Published: IOP Publishing, 2020-06-02T17:22:49Z.
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