Fabrication of high aspect ratio AFM probes with different materials inspired by TEM "lift-out" method

The most commonly used materials in all commercially available high-aspect-ratio (HAR) nanowire's (NW) tips are made of silicon and carbon nanotube which limit their applications in other types of atomic force microscopy (AFM), such as conducting AFM and magnetic force microscope. Therefore, a...

Full description

Bibliographic Details
Main Authors: Tan, Swee-Ching (Author), Zhao, Hangbo (Author), Thompson, Carl Vernette (Author)
Other Authors: Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor), Massachusetts Institute of Technology. Department of Mechanical Engineering (Contributor)
Format: Article
Language:English
Published: American Vacuum Society, 2020-07-15T20:20:22Z.
Subjects:
Online Access:Get fulltext