Atom sieve for nanometer resolution neutral helium microscopy

Neutral helium microscopy is a new tool for imaging fragile and/or insulating structures as well as structures with large aspect ratios. In one configuration of the microscope, neutral helium atoms are focused as de Broglie matter waves using a Fresnel zone plate. The ultimate resolution is determin...

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Bibliographic Details
Main Authors: Flatabø, Ranveig (Author), Greve, Martin M. (Author), Eder, Sabrina D. (Author), Kalläne, Matthias (Author), Palau, Adrià Salvador (Author), Berggren, Karl K (Author), Holst, Bodil (Author)
Other Authors: Massachusetts Institute of Technology. Research Laboratory of Electronics (Contributor)
Format: Article
Language:English
Published: American Vacuum Society, 2020-07-16T19:41:50Z.
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