A MEMS Magnetic-Based Vibration Energy Harvester

A MEMS Magnetic-Based Vibration Energy Harvester

This paper presents the design, analysis and integrated fabrication of a MEMS magnetic-based vibration energy harvester targeted for machine health monitoring. The design consists of Si-springs, permanent magnets as mass, and coils wound on the top and bottom side of the harvester package for mechan...

Full description

Bibliographic Details
Main Authors: Shin, Abraham (Author), Radhakrishna, Ujwal (Author), Yang, Yuechen (Author), Zhang, Q. (Author), Gu, L. (Author), Riehl, P. (Author), Chandrakasan, Anantha P (Author), Lang, Jeffrey H (Author)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Research Laboratory of Electronics (Contributor)
Format: Article
Language:English
Published: IOP Publishing, 2021-01-13T20:54:34Z.
Subjects:
Article
Online Access:Get fulltext

Internet

Get fulltext

Similar Items