Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact

Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact

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Main Authors: Laine, Hannu S. (Author), Vahlman, Henri (Author), Haarahiltunen, Antti (Author), Jensen, Mallory A. (Author), Modanese, Chiara (Author), Wagner, Matthias (Author), Wolny, Franziska (Author), Buonassisi, Tonio (Author), Savin, Hele (Author)
Format: Article
Language:English
Published: Author(s), 2021-10-28T17:46:33Z.
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