Grayscale stencil lithography for patterning multispectral color filters
© 2020 Optical Society of America Flat optics for spatially resolved amplitude and phase modulation usually rely on 2D patterning of layered structures with spatial thickness variation. For example, Fabry-Perot-type multilayer structures have been applied widely as spectral filter arrays. However, i...
| Main Authors: | , , |
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| Other Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
The Optical Society,
2021-12-20T23:49:01Z.
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| Subjects: | |
| Online Access: | Get fulltext |