Wet-based digital etching on GaN and AlGaN

Department of Defense (DoD)

Bibliographic Details
Main Authors: Shih, Pao-Chuan (Author), Engel, Zachary (Author), Ahmad, Habib (Author), Doolittle, William Alan (Author), Palacios, Tomás (Author)
Format: Article
Language:English
Published: AIP Publishing, 2022-04-19T15:43:03Z.
Subjects:
Online Access:Get fulltext