Integration of reactive polymeric nanofilms into a low-power electromechanical switch for selective chemical sensing

Integration of reactive polymeric nanofilms into a low-power electromechanical switch for selective chemical sensing

This paper presents the fabrication and demonstration of an ultrathin microelectromechanical chemical sensing device. Microcantilevers are etched from 100-nm-thick silicon nitride, and a 75-nm-thick reactive copolymer film for sensing is deposited by initiated chemical vapor deposition. Cross-linkin...

Full description

Bibliographic Details
Main Authors: Arora, William J. (Contributor), Tenhaeff, Wyatt E. (Contributor), Barbastathis, George (Contributor), Gleason, Karen K (Author)
Other Authors: Massachusetts Institute of Technology. Institute for Soldier Nanotechnologies (Contributor), Massachusetts Institute of Technology. Department of Chemical Engineering (Contributor), Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Department of Mechanical Engineering (Contributor), Gleason, Karen K. (Contributor)
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineers, 2010-10-05T14:29:32Z.
Subjects:
Article
Online Access:Get fulltext

Internet

Get fulltext

Similar Items